Highlighted products

APC butterfly valves

APC butterfly valves

These high-functioning APC valves, developed for the CVD/ALD processes used in the semiconductor manufacturing process, have a maximum set temperature of 190°C, 3 million cycles durability, and three functions (sealing, slow exhaust, pressure regulation) with a high-speed open/close function.

Features

Valve open/close
Slow exhaust
Pressure regulation
Newly developed seat ring mechanism

Newly developed seat ring mechanism

The newly developed seat ring mechanism eliminates problems with the O-ring mounted on the flapper, such as torsion or falling out. Also, the flapper seal is grease-free to protect the reaction chamber from contamination.

High durability

The seat ring mechanism reduces stress on the O-ring, providing high durability.
Full opening/closing operation: 3 million cycles

Reduces internal byproducts with proprietary heating

By heating not only the body but also the flapper interior, excellent adaptability is achieved for processes that involve a large amount of byproducts. (Optional)

Interface

Interface

(1) Indicator 
(2) Power cable 
(3) Interface communication 
(4) Service 
(5) Sensor input 
(6) Micro connector terminal 
The interface changes according to the communication format. 
The photo shows DeviceNet™.

Main specifications

Main specifications
Main specifications
Main specifications
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