---
title: Fluorine resin diaphragm valves for use up to 200°C | KITZ SCT CORPORATION
description: This is the Fluorine resin diaphragm valves for use up to 200°C page for the KITZ SCT CORPORATION. As a part of the all-around valve manufacturer KITZ Group, KITZ SCT maintains an integrated system providing development, manufacture, sales, and servicing of fluid control devices and equipment such as valves for semiconductor processes.
image: https://en.kitzsct.com/hubfs/assets/images/ogp.jpg
---

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## Fluorine resin diaphragm valves for use up to 200°C

![Fluorine resin diaphragm valves for use up to 200°C](https://en.kitzsct.com/hubfs/images/products/highlight/16/img_16_001.jpg)

Fluorine resin diaphragm valves supporting fluid temperatures of 200°C. Usable in severe environments such as semiconductor and LED manufacturing, on sites where high cleanliness is required.

## Features

- Supports fluids of 200°C
- Sturdy structure handles high-temperature heating cycles

### Automatic valves

- Air port direction can be adjusted over 360°   
  → Easy piping layout
- Equipped as standard with (open/close) indicator   
  → Easy confirmation of operation status

### Manual valves

- Attention to safety with LOTO (lock) mechanism   
  → Misoperation prevented with padlock
- Uses a step toggle operation method with opening which can be set in 3 stages!   
  → Easier use achieved with a fully open/intermediate degree of opening (2 stages)/closed function

## Application examples

- Supply and collection of sulfuric acid in resist stripping processes
- Supply and collection of high-temperature phosphoric acid in nitride film etching processes
- Cleaning/etching equipment

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