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Fluorine resin diaphragm valves for use up to 200°C

Fluorine resin diaphragm valves for use up to 200°C

Fluorine resin diaphragm valves supporting fluid temperatures of 200°C. Usable in severe environments such as semiconductor and LED manufacturing, on sites where high cleanliness is required.

Features

  • Supports fluids of 200°C

  • Sturdy structure handles high-temperature heating cycles

Automatic valves

  • Air port direction can be adjusted over 360°
    → Easy piping layout

  • Equipped as standard with (open/close) indicator
    → Easy confirmation of operation status

Manual valves

  • Attention to safety with LOTO (lock) mechanism
    → Misoperation prevented with padlock

  • Uses a step toggle operation method with opening which can be set in 3 stages!
    → Easier use achieved with a fully open/intermediate degree of opening (2 stages)/closed function

Application examples

  • Supply and collection of sulfuric acid in resist stripping processes

  • Supply and collection of high-temperature phosphoric acid in nitride film etching processes

  • Cleaning/etching equipment

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