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General-purpose square gate valves

General-purpose square gate valves

In compliance with the SEMI E21.1-1296 standard, square vacuum gate valves for 300 mm wafers use a new non-sliding mechanism, reducing particles and enhancing reliability.

Features

Realizing low particle generation

With a new non-sliding mechanism, factors in particle generation during valve open/close action have been minimized.

Improved seal part reliability

  • Bonded seal type (O-ring adhesion type) available as an option.

  • Preventing O-ring fallout and retaining stable seal performance, the effect also further reduces particle generation.

Improved seal part reliability

Main specifications

Gate size

50mm×336mm

Operating pressure

1×10-8 Pa~0.1MPa

Max operating temperature

Body: 120°C
Environment: 80°C (room temperature specifications)

External heater setting maximum temperature

180°C *External heater is an option

Operation type

Double action

Operation durability count

3 million cycles

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