--- title: General-purpose square gate valves | KITZ SCT CORPORATION description: This is the General-purpose square gate valves page for the KITZ SCT CORPORATION. As a part of the all-around valve manufacturer KITZ Group, KITZ SCT maintains an integrated system providing development, manufacture, sales, and servicing of fluid control devices and equipment such as valves for semiconductor processes. image: https://en.kitzsct.com/hubfs/assets/images/ogp.jpg --- Find a product Fitting Thermoplastic valve Vacuum valves Diaphragm valve Bellows valve Check valve Clean butterfly valve [ Product Number Search ](https://en.kitzsct.com/products/search/model) Downloads - [![icon_01_catalog](https://en.kitzsct.com/hubfs/images/home/icon_01_catalog.svg) Product catalogs ](https://en.kitzsct.com/document#anchor01) - [![icon_02_cad](https://en.kitzsct.com/hubfs/images/home/icon_02_cad.svg) CAD/Drawings ](https://en.kitzsct.com/document#anchor02) - [![icon_03_paper](https://en.kitzsct.com/hubfs/images/home/icon_03_paper.svg) White papers ](https://en.kitzsct.com/document#anchor03) - [![icon_04_technology](https://en.kitzsct.com/hubfs/images/home/icon_04_technology.svg) Tech document ](https://en.kitzsct.com/document#anchor04) ## General-purpose square gate valves ![General-purpose square gate valves](https://en.kitzsct.com/hubfs/images/products/highlight/5/img_5_001.png) In compliance with the SEMI E21.1-1296 standard, square vacuum gate valves for 300 mm wafers use a new non-sliding mechanism, reducing particles and enhancing reliability. ## Features ### Realizing low particle generation With a new non-sliding mechanism, factors in particle generation during valve open/close action have been minimized. ### Improved seal part reliability - Bonded seal type (O-ring adhesion type) available as an option. - Preventing O-ring fallout and retaining stable seal performance, the effect also further reduces particle generation. ![Improved seal part reliability](https://en.kitzsct.com/hubfs/images/products/highlight/5/img_5_002.png) ## Main specifications Gate size 50mm×336mm Operating pressure 1×10-8 Pa~0.1MPa Max operating temperature Body: 120°C Environment: 80°C (room temperature specifications) External heater setting maximum temperature 180°C *External heater is an option Operation type Double action Operation durability count 3 million cycles Contact our sales personnel for details. Inquiries can also be made via the button below. [![CONTACTInquiries about products in general KITZ SCT offers a range of products suited to customer purposes. Feel free to contact us any time. Inquiries](https://no-cache.hubspot.com/cta/default/20800877/d1c4d485-c32b-44cb-8df8-011f5bc16e53.png)](https://cta-redirect.hubspot.com/cta/redirect/20800877/d1c4d485-c32b-44cb-8df8-011f5bc16e53)