TDF4 High speed, high durability valves
Product overview

This diaphragm valve has the high-speed response, high durability, and Cv stability required for ALD processes.
Reference product number : TDF4CS-GA-S-EP-316L
Specification overview
- Ports-Flow
-
2Ports-Straight
- Connection Size (in)
-
1/4"
- Connection Type
-
C-Seal
- Cv
-
0.21
- Minimum Fluid Temperature (Celsius)
-
20
- Maximum Fluid Temperature (Celsius)
-
120
- Minimum Ambience Temperature (Celsius)
-
20
- Maximum Ambience Temperature (Celsius)
-
120
- Maximum Operating Pressure (MPa)
-
0.7
- Actuation
-
NC
- Seat Material
-
PFA
- Surface Finish
-
EP
- Body Material
-
316L
- Indicator Sensor
-
with sensor
*Parts of the listed product images may not be the same as the actual products.
Download diagrams for main product numbers
*To download diagrams (PDFs, CAD, STEP), you must log in or register as a member.
Main product numbers | CAD | STEP | Connection Size (in) | Connection Type | Maximum Fluid Temperature (Celsius) | Maximum Ambience Temperature (Celsius) | Actuation | Seat Material | Surface Finish | Flow | Handle | |
---|---|---|---|---|---|---|---|---|---|---|---|---|
TDF4CS-GA-EP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | EP | - | - |
TDF4CS-GA-SEP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | SEP | - | - |
TDF4OS-GA-EP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | EP | - | - |
TDF4OS-GA-SEP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | SEP | - | - |
TDF4CS-GA-STD-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | STD | - | - |
TDF4OS-GA-STD-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | STD | - | - |
TDF4CS-GA-S-STD-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | STD | - | - |
TDF4CS-GA-S-EP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | EP | - | - |
TDF4CS-GA-S-SEP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NC | PFA | SEP | - | - |
TDF4OS-GA-S-STD-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | STD | - | - |
TDF4OS-GA-S-EP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | EP | - | - |
TDF4OS-GA-S-SEP-316L | - | - | - | 1/4" | C-Seal | 120 | 120 | NO | PFA | SEP | - | - |