Vacuum valves

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Operation
Ports-Flow

Special structures (Mono-block, L-type etc.) can be selected.Contact from the inquiry form.

Ports-Flow

Special structures (Mono-block, L-type etc.) can be selected.Contact from the inquiry form.

Valve Function

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Total of 3 products found.

IVB_V Vacuum Isolation Valve with Slow Exhaust

This vacuum bellows valve integrates the main and bypass valves. Suppresses the sharp pressure fluctuations occurring when exhausting from atmosphere to vacuum, controlling pressure with slow exhaust via the bypass valve before the main valve opens/closes. Two types of bypass valves (flow rate fixed type and flow rate adjustment type) are available.

IVB Vacuum Isolation Valves Pneumatic

This L-type vacuum bellows valve realizes durability and corrosion resistance.

IVBH Heated Vacuum Isolation Valves Pneumatic

This vacuum valve has a spiral heater mounted inside the bellows, enabling bellows heating whether the valve is open or closed. Along with its external heater, this valve is heated from within the bellows to eliminate cold spots and enable reduced adhesion of generated material.