Reference materials

New product catalogs

KDS_en

SCV submersible valves® KD-S Series

These valves are suited to atomic layer deposition (ALD) processes.

SCV Submersible Valve® TD-S Series

SCV Submersible Valve® TD-S Series

These valves, supporting integrated gas systems, are usable in high-temperature environments.

High-pressure Diaphragm Valve NRD Series

High-pressure Diaphragm Valve NRD Series

These valves support high pressure with a wide flow rate range.

High-speed, high-cycle life valves TDF Series

High-speed, high-cycle life valves TDF Series

These valves balance high-speed open/close, high durability, heat resistance, and Cv stability.

High-speed, high-cycle life valves TDF4 Series

High-speed, high-cycle life valves TDF4 Series

Supporting atomic layer deposition (ALD) processes. These valves balance high-speed open/close, high durability, and Cv stability.

CVC Fittings LockAssist®

CVC Fittings LockAssist®

This is a safety fixture preventing loosening due to vibration.

Replaceable Seat Valve KD-E Series

Replaceable Seat Valve KD-E Series

These valves enable easy seat and diaphragm replacement.

Diaphragm Valve with Relief Function

Diaphragm Valve with Relief Function

These valves have a safety function.

ZD/ZD-K 250℃ High-temperature Replaceable Diaphragm valve

250℃ High-temperature Replaceable Diaphragm Valve ZD/ZD-K Series

This can be used in high-temperature environments and the seats of which are detachable and replaceable.

Compact Diaphragm Valve XD Series

Compact Diaphragm Valve XD Series

This is for high-purity gas processes.  Available for use in a wide range of fields, including semiconductors.

2.0MPa Diaphragm valves NDD Series

2.0MPa Diaphragm valves NDD Series

This is a 2.0 MPa specification diaphragm valve. This high-quality diaphragm valve supports high-purity liquid materials for semiconductors.

NTD_E

Diaphragm Valve for 1.125" C-Seal NTD series

The NTD series are compatible for 1.125” C-Seal substrate that achieves high durability and Cv consistency.

PFM_J

PFA Infrared (IR) Fusion Machine PFM series

PFA infrared fusion machine which adopts new aluminum nitride heater high with thermal uniformity.

PCVA_E

APC Butterfly Valve PCVA Series

Butterfly valve with AUTO PID function for various types of control.

Others