Reference materials

New product catalogs

KDS_en

SCV submersible valves® KD-S Series

These valves are suited to atomic layer deposition (ALD) processes.

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SCV Submersible Valve® TD-S Series

SCV Submersible Valve® TD-S Series

These valves, supporting integrated gas systems, are usable in high-temperature environments.

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High-pressure Diaphragm Valve NRD Series

High-pressure Diaphragm Valve NRD Series

These valves support high pressure with a wide flow rate range.

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High-speed, high-cycle life valves TDF Series

High-speed, high-cycle life valves TDF Series

These valves balance high-speed open/close, high durability, heat resistance, and Cv stability.

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High-speed, high-cycle life valves TDF4 Series

High-speed, high-cycle life valves TDF4 Series

Supporting atomic layer deposition (ALD) processes. These valves balance high-speed open/close, high durability, and Cv stability.

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CVC Fittings LockAssist®

CVC Fittings LockAssist®

This is a safety fixture preventing loosening due to vibration.

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Replaceable Seat Valve KD-E Series

Replaceable Seat Valve KD-E Series

These valves enable easy seat and diaphragm replacement.

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Diaphragm Valve with Relief Function

Diaphragm Valve with Relief Function

These valves have a safety function.

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ZD/ZD-K 250℃ High-temperature Replaceable Diaphragm valve

250℃ High-temperature Replaceable Diaphragm Valve ZD/ZD-K Series

This can be used in high-temperature environments and the seats of which are detachable and replaceable.

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Compact Diaphragm Valve XD Series

Compact Diaphragm Valve XD Series

This is for high-purity gas processes.  Available for use in a wide range of fields, including semiconductors.

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2.0MPa Diaphragm valves NDD Series

2.0MPa Diaphragm valves NDD Series

This is a 2.0 MPa specification diaphragm valve. This high-quality diaphragm valve supports high-purity liquid materials for semiconductors.

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NTD_E

Diaphragm Valve for 1.125" C-Seal NTD series

The NTD series are compatible for 1.125” C-Seal substrate that achieves high durability and Cv consistency.

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Others